PHOTORESIST REDUCTION SYSTEM

摘要

The present invention relates to a photoresist reduction system. The photoresist reduction system according to one embodiment of the present invention includes a first container (1) which receives photoresist; a first buffer tank (2) which detects air bubbles included in the photoresist; a first pressing gas injection pipe (3); a first connection pipe (4); a second buffer tank (7); a second pressing gas injection pipe (8); a second connection pipe (9); a manifold (13); a discharge pipe (14) connected to the manifold (13); and a control part (18). According to one embodiment of the present invention, the control part (18) opens a second bent vale (10) and a third valve (17b).