SURFACE ACOUSTIC WAVE DEVICE AND METHOD OF MANUFACTURING THE SAME

摘要

The present invention relates to a surface acoustic wave element of high reliability and a method of manufacturing the same which can be stood in consolidated situation than an existing reliability level by adding a material which stands to high humidity to the outer side covered by a resin film when a surface acoustic wave element having a hollowed structure is manufactured. The surface acoustic wave element according to the present invention forms an inter-digitated transducer (IDT) vibration unit to produce surface acoustic wave on a substrate of a piezoelectric element and separately forms a pad from the IDT vibration unit at regular intervals and forms a bump on the pad with a fixed height. The surface acoustic wave element mounts a ceramic substrate on the piezoelectric element with the flip chip bonding through the bump to be faced with a surface in which an IDT electrode unit is formed. A resin film is sealed on the piezoelectric element from the ceramic substrate. Parylene or super hydrophobic coating material is coated on the entire resin film and the ceramic substrate.