| 摘要 |
A method for operating a pressure sensor, which includes a measuring membrane, at least one platform and a capacitive transducer having two pressure dependent capacitances between electrodes on the measuring membrane The measuring membrane divides a volume pressure-tightly into two volume portions, wherein the second volume portion is enclosed in a measuring chamber between the measuring membrane and the platform. A deflection of the measuring membrane depends on a pressure measurement variable p, which is a difference between a first pressure p1 and second pressure p2 in the volume portions. The pressure measurement variable p follows from both capacitances, wherein, for an intact pressure sensor, the second capacitance is a predetermined function of the first capacitance and, in given cases, the temperature. The method has steps as follows: registering value pairs of both capacitances; testing whether the value pairs correspond within a tolerance range to the predetermined function; and determining a change, respectively damage, of the sensor, when this is too long not the case. |
