| 摘要 |
<p>A piezoresistive MEMS oscillator comprises a resonator body (20), first and second drive electrodes (30) located adjacent the resonator body for providing an actuation signal; and at least a first sense electrode (24) connected to a respective anchor point (22). The voltages at the electrodes (30,24) are controlled and/or processed such that the feedthrough AC current from one drive electrode (30) to the sense electrode (24) is at least partially offset by the feedthrough AC current from the other drive electrode (30) to the sense electrode (24).</p> |
