| 摘要 |
A technology can efficiently dry the high-boiling point solvent contained in the object and achieve the space-saving and energy-saving of a drying apparatus. A drying method for drying an object containing a first solvent while conveying the object into a chamber (38), comprises: a first drying step of drying the object up to a drying point in the prestage of the chamber (38); and a second drying step of forming a vapor atmosphere of a second solvent having a lower boiling point than the first solvent in the chamber (38) and drying the object such that the temperature of the object in an inlet port of the chamber (38) is made to be lower by a predetermined temperature difference than the temperature of the vapor atmosphere. |
