| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface treatment liquid capable of easily and efficiently achieving the hydrophobizing treatment of a substrate, a hydrophobizing treatment method using the surface treatment liquid, and a hydrophobized substrate. SOLUTION: The hydrophobizing treatment of the substrate is executed by using the surface treatment liquid containing a silylation agent and a hydrocarbon-based nonpolar solvent. As the silylation agent, N, N-dimethylamino trimethylsilane (DMATMS) is preferable, and as the hydrocarbon-based nonpolar solvent, a hydrocarbon-based solvent in a straight chain shape or a branch chain shape of carbon numbers 6-12 or a terpene solvent is preferable. COPYRIGHT: (C)2010,JPO&INPIT |
