Operation control device for vacuum pump and method for stopping operation thereof

摘要

To provide an operation control device for a vacuum pump and a method for stopping the operation of the vacuum pump that make it possible to effectively remove products, resulting from solidification and liquefaction of gas in a casing and possibly hindering the rotation of a pump rotor, so that the vacuum pump may be started normally. An operation control device (10) for a vacuum pump having a pump rotor (1) disposed in a casing (2) for free rotation includes a pump rotor control section (15) for controlling the rotation of the pump rotor (1). The pump rotor control section (15) has a function to, after a pump stop action has been taken, rotate the pump rotor (1) in forward and/or reverse directions according to a predetermined timing pattern and then stop the pump rotor (1).