| 摘要 |
PROBLEM TO BE SOLVED: To provide a positioning apparatus for facilitating mounting of semiconductor substrates. SOLUTION: The positioning apparatus for positioning and superimposing a certain semiconductor substrate on another semiconductor substrate includes a first stage for holding a surface of the certain semiconductor substrate which is superimposed on the other semiconductor substrate, in an upward state; a second stage for holding a surface of the other semiconductor substrate which is superimposed on the certain semiconductor substrate in a downward state; and a stage rotating section for making at least either the first or the second stages rotate in a vertical direction so that the surfaces to be superimposed of the certain and the other semiconductor substrates can face each other. COPYRIGHT: (C)2011,JPO&INPIT |
