发明名称 SUPER LATTICE/QUANTUM WELL NANOWIRES
摘要 Segmented semiconductor nanowires are manufactured by removal of material from a layered structure of two or more semiconductor materials in the absence of a template. The removal takes place at some locations on the surface of the layered structure and continues preferentially along the direction of a crystallographic axis, such that nanowires with a segmented structure remain at locations where little or no removal occurs. The interface between different segments can be perpendicular to or at angle with the longitudinal direction of the nanowire.
申请公布号 EP2257968(A4) 申请公布日期 2014.05.07
申请号 EP20090724159 申请日期 2009.01.29
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 HOVEL, HAROLD, J.;HUANG, QIANG;SHAO, XIAOYAN;VICHICONTI, JAMES;WALKER, GEORGE, F.
分类号 H01L21/308;B82Y10/00;B82Y40/00;C30B29/02;H01L21/306;H01L29/06;H01L31/06 主分类号 H01L21/308
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