摘要 |
<p>This invention relates to an apparatus and a method for the plasma coating of large-volume parts. For this purpose, a vacuum chamber (3) with one or more pumps, a transport apparatus (2) for the conveyance of the parts (1, 17) into the vacuum chamber (3), insulation (4) between the part (1, 17) and the vacuum chamber (3), an oscillating circuit with a high frequency generator (5), an adjustable capacitance and an adjustable inductance of the oscillating circuit, at least one connection to connect the oscillating circuit with the part (1) and at least one plasma torch (19) connected to the vacuum chamber (3) are provided for the preparation of a coating material for the part (1, 17).</p> |