| 摘要 |
PROBLEM TO BE SOLVED: To provide an actuator which enlarges a movable range of a movable electrode without increasing a thickness of the movable electrode. SOLUTION: An actuator comprises at least: a fixed electrode part 102 composed of four or more fixed electrodes arranged spaced apart on a substrate 101; and a movable electrode 103 including a plurality of comb-teeth parts 131 each disposed between adjacent fixed electrodes, being displaceable in a direction normal to the substrate 101, and each having a width within a range being not contact with adjacent fixed electrodes. In this embodiment, the fixed electrode part 102 is constituted of six fixed electrodes 121 to 123. In addition, the fixed electrodes 121 to 123 are formed lower at a position nearer to the center of the array. COPYRIGHT: (C)2013,JPO&INPIT |
