发明名称
摘要 A vaporizer for receiving and vaporizing particulate material, comprising: a heater having a reticulated material structure composed of ligands that define voids adapted to receive particulate materials, wherein the voids comprise greater than 85% of the volume of the reticulated material structure so that delivery of particulate material into the voids and conduction of vaporized material from the voids is facilitated; causes heat to be produced or conducted by the ligands to cause the particulate material in the voids to vaporize and be conducted through the voids.
申请公布号 JP5485888(B2) 申请公布日期 2014.05.07
申请号 JP20100519943 申请日期 2008.08.01
申请人 发明人
分类号 C23C14/24;H01L51/50;H05B33/10 主分类号 C23C14/24
代理机构 代理人
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