SUBSTRATE CLEANING APPARATUS AND SUBSTRATE CLEANING METHOD

摘要

The purpose of the present invention is to prevent that the cleaning is continue while an error roll weight is added to a substrate from a roll cleaning member by detecting rapidly that a load cell for measuring a roll weight breaks down in the cleaning of the substrate. The present invention comprise; a roll holder (42) which supports and rotates a roll cleaning member (46) extended in a horizontal position as a gauge rod shape; an elevating tool (60) which elevates the roll holder (42) so that the roll cleaning member (46) adds a predetermined roll weight to a substrate (W) based on the drive of an actuator (56) including a controlling tool (62); a load cell (54) which measures the roll weight; a control unit (66) which feedback-controls the roll weight through the controlling tool (62) based on a measuring value of the load cell (54); and a monitoring unit (80) which monitors whether a control amount of the controlling tool (62) gets out of a permissible range of a control amount standard value according to the predetermined roll weight.