发明名称 APPARATUS FOR ATTACHING FUNCTIONAL FILM
摘要 An apparatus for attaching a functional film is disclosed. The apparatus for attaching a functional film according to an embodiment of the present invention comprises: a table which forms a space in which a panel is adsorbed in vacuum to progress a panel loading/unloading process, a protective film peeling process, a panel inspection process, and a functional film attaching process for the panel, and comprises a stage in which an adsorption surface of the panel is divided into a high suction part and a low suction part; and a vacuum module for generating a vacuum pressure to the adsorption surface of the stage by being attached to the stage.
申请公布号 KR20140052310(A) 申请公布日期 2014.05.07
申请号 KR20120118287 申请日期 2012.10.24
申请人 SFA ENGINEERING CORP. 发明人 JUNG, SUNG WHA;JUNG, JAE HOON;JO, WON IL;OH, CHANG IK;KIM, SU YEON
分类号 H01L51/56;H05B33/10 主分类号 H01L51/56
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