发明名称 |
APPARATUS FOR ATTACHING FUNCTIONAL FILM |
摘要 |
An apparatus for attaching a functional film is disclosed. The apparatus for attaching a functional film according to an embodiment of the present invention comprises: a table which forms a space in which a panel is adsorbed in vacuum to progress a panel loading/unloading process, a protective film peeling process, a panel inspection process, and a functional film attaching process for the panel, and comprises a stage in which an adsorption surface of the panel is divided into a high suction part and a low suction part; and a vacuum module for generating a vacuum pressure to the adsorption surface of the stage by being attached to the stage. |
申请公布号 |
KR20140052310(A) |
申请公布日期 |
2014.05.07 |
申请号 |
KR20120118287 |
申请日期 |
2012.10.24 |
申请人 |
SFA ENGINEERING CORP. |
发明人 |
JUNG, SUNG WHA;JUNG, JAE HOON;JO, WON IL;OH, CHANG IK;KIM, SU YEON |
分类号 |
H01L51/56;H05B33/10 |
主分类号 |
H01L51/56 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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