发明名称 HEATER APPARATUS
摘要 The purpose of the present invention is to provide a heater device capable of preventing the movement of a heater element. The heater device comprises a heat insulating material, a cylindrical support disposed in the vicinity of the heat insulating material, a heater element formed by being spirally wound around the outer circumference of the support a plurality of times, and a movement preventing member preventing the movement of the heater element in the axial direction of the support.
申请公布号 KR20140052843(A) 申请公布日期 2014.05.07
申请号 KR20130124593 申请日期 2013.10.18
申请人 TOKYO ELECTRON LIMITED 发明人 KOBAYASHI MAKOTO
分类号 H01L21/02;H01L21/683 主分类号 H01L21/02
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