发明名称 |
Robot with heat dissipating stator |
摘要 |
A substrate transport apparatus including a drive section and a first movable arm assembly. The drive section includes a first motor. The first motor includes a stator and a passive rotor. The first movable arm assembly is connected to the first motor. The substrate transport apparatus is configured for the first movable arm assembly to be positionable in a vacuum chamber with the passive rotor being in communication with an environment inside the vacuum chamber. |
申请公布号 |
US8716909(B2) |
申请公布日期 |
2014.05.06 |
申请号 |
US201313744966 |
申请日期 |
2013.01.18 |
申请人 |
PERSIMMON TECHNOLOGIES, CORP. |
发明人 |
HOSEK MARTIN;HA TUAN;HOFMEISTER CHRISTOPHER;POOLE DENNIS |
分类号 |
H02K1/32 |
主分类号 |
H02K1/32 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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