发明名称 Semiconductor device and method of fabricating same
摘要 A semiconductor device having a core device with a high-k gate dielectric and an I/O device with a silicon dioxide or other non-high-k gate dielectric, and a method of fabricating such a device. A core well and an I/O well are created in a semiconductor substrate and separated by an isolation structure. An I/O device is formed over the I/O well and has a silicon dioxide or a low-k gate dielectric. A resistor may be formed on an isolation structure adjacent to the core well. A core-well device such as a transistor is formed over the core well, and has a high-k gate dielectric. In some embodiments, a p-type I/O well and an n-type I/O well are created. In a preferred embodiment, the I/O device or devices are formed prior to forming the core device and protected with a sacrificial layer until the core device is fabricated.
申请公布号 US8716103(B2) 申请公布日期 2014.05.06
申请号 US201313891921 申请日期 2013.05.10
申请人 TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. 发明人 CHENG CHUNG LONG;CHUNG SHENG-CHEN;THEI KONG-BENG;CHUANG HARRY-HAK-LAY;LIANG MONG-SONG
分类号 H01L21/76 主分类号 H01L21/76
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