发明名称 |
Catheter die and method of fabricating the same |
摘要 |
A catheter die is provided and includes a device layer defining a cavity and including a piezoresistive pressure sensor operably disposed proximate to the cavity and an insulator having an opening and being disposed on an upper surface of the device layer such that a portion of the piezoresistive pressure sensor is exposed through the opening. The catheter die further includes an insulation layer bonded to a lower surface of the device layer and first and second bond pads, the first bond pad being electrically coupled to the portion of the piezoresistive pressure sensor via the opening and the second bond pad being disposed on the insulation layer. |
申请公布号 |
US8714021(B2) |
申请公布日期 |
2014.05.06 |
申请号 |
US201213406395 |
申请日期 |
2012.02.27 |
申请人 |
GAMAGE SISIRA KANKANAM;AMPHENOL THERMOMETRICS, INC. |
发明人 |
GAMAGE SISIRA KANKANAM |
分类号 |
G01L9/06;B29C47/92;G01L9/00 |
主分类号 |
G01L9/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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