发明名称 |
Method and apparatus for showerhead cleaning |
摘要 |
Embodiments of the present invention generally relate to a method and apparatus for ex-situ cleaning of a chamber component part. In one embodiment, a system for cleaning component parts in a cleaning chemistry is provided. The system comprises a wet bench set-up comprising a cleaning vessel assembly for holding one or more component parts to be cleaned during a cleaning process and a detachable cleaning cart detachably coupled with the cleaning vessel assembly for supplying one or more cleaning chemistries to the cleaning vessel assembly during the cleaning process. |
申请公布号 |
US8714166(B2) |
申请公布日期 |
2014.05.06 |
申请号 |
US201313748709 |
申请日期 |
2013.01.24 |
申请人 |
QUANTUM GLOBAL TECHNOLOGIES, LLC |
发明人 |
SOMMERS JOSEPH F.;WANG JIANSHENG;DO DAVID;ADAMALA SATYANARAYANA;TRAHAN RONALD |
分类号 |
B08B3/04;B08B3/00 |
主分类号 |
B08B3/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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