发明名称 |
Enhanced integrity projection lens assembly |
摘要 |
The present invention relates to a projection lens assembly module for directing a multitude of charged particle beamlets onto an image plane located in a downstream direction, and a method for assembling such a projection lens assembly. In particular the present invention discloses a modular projection lens assembly with enhanced structural integrity and/or increased placement precision of its most downstream electrode. |
申请公布号 |
US8716671(B2) |
申请公布日期 |
2014.05.06 |
申请号 |
US201213722774 |
申请日期 |
2012.12.20 |
申请人 |
KONING JOHAN JOOST;STEENBRINK STIJN WILLEM HERMAN KAREL;SCHIPPER BART |
发明人 |
KONING JOHAN JOOST;STEENBRINK STIJN WILLEM HERMAN KAREL;SCHIPPER BART |
分类号 |
H01J37/12 |
主分类号 |
H01J37/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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