发明名称 |
Acceleration detector, acceleration detecting device, inclination sensor, inclination sensor device, and electronic device |
摘要 |
An acceleration detector includes a base portion, a plate-like movable portion connected to the base portion via a joint portion, an acceleration detecting element laid over the base portion and the movable portion, and a supporting portion having a part extending along the movable portion from the base portion, as viewed in a plan view. A mass portion partly overlapping the supporting portion, as viewed in a plan view, is arranged on at least one of two main surfaces of the movable portion. The movable portion is displaceable about the joint portion as a fulcrum in a direction intersecting the main surface according to an acceleration applied in the direction intersecting the main surface. A space is provided between the mass portion and the supporting portion in an area where the mass portion and the supporting portion overlap each other. |
申请公布号 |
US8714013(B2) |
申请公布日期 |
2014.05.06 |
申请号 |
US201213415136 |
申请日期 |
2012.03.08 |
申请人 |
WATANABE JUN;NAKASENDO KAZUYUKI;SEIKO EPSON CORPORATION |
发明人 |
WATANABE JUN;NAKASENDO KAZUYUKI |
分类号 |
G01P15/10;G01C9/06;G01P15/02 |
主分类号 |
G01P15/10 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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