PROCEDIMIENTO PARA DEPOSITAR CALCOGENUROS POR CO-EVAPORACION FISICA.

摘要

The invention relates to a method for depositing chalcogenides, controlling the gas pressure by means of pulsed, continuous activation of a valve on the source of chalcogen gas. Applying said pulses makes it possible to control the pressure in the chamber such that the stoichiometry can be easily controlled, while doing away with the need for complicated valves.