| 摘要 |
<p>Disclosed is a chamber for laser lift-off. The chamber includes a rotary panel unit which rotates within a preset angle range, a rotation driving unit which drives the rotary panel unit, a plurality of susceptors which are fixed on the rotary panel unit, and a cover unit which covers and receives the rotary panel unit and the susceptor and includes a transfer slit to input and output a substrate on one side thereof and an opening part which is separated from the transfer slit with a preset angle on the upper side thereof. A transfer stage vertically transfers the chamber. According to the present invention, processing yield is improved and damage to the substrate due to thermal stress is prevented by successively cooling heat in a laser lift-off process by simultaneously cooling the substrate on which the laser lift-off process is completed and applying a new laser lift-off process.</p> |
