发明名称 A PAD DRESSER
摘要 The present invention relates to a pad dresser. The pad dresser according to one embodiment of the present invention includes an outer ring; an inner ring which is located in the outer ring; at least one plate which is located between the outer ring and the inner ring; and at least one first dressing segment which is located on the upper surface of the plate. The pad dresser according to one embodiment of the present invention further includes a second dressing segment which is located on the upper surface of the inner ring.
申请公布号 KR101390803(B1) 申请公布日期 2014.05.02
申请号 KR20120154950 申请日期 2012.12.27
申请人 LG SILTRON INCORPORATED 发明人 AN, MI GAH
分类号 H01L21/304 主分类号 H01L21/304
代理机构 代理人
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