摘要 |
An electronic device of the type wherein a semiconductor stack is functionally supported by interconnects, electrical contacts and dielectric materials. The interconnects and electrical contacts are composed of iridium, ruthenium, zirconium, niobium, tantalum, rhodium, chromium, nickel, palladium, osmium, platinum, titanium, silver and their alloys. The dielectric materials are formed of mixtures of titanium oxide, zirconium oxide, iridium oxide, silver oxide, ruthenium oxide, and niobium oxide. An adhesion layer may be formed of ruthenium, nickel, iridium, zirconium, titanium, chromium, and alloys thereof. |