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发明名称
用于干涉系统的自动对焦方法
摘要
申请公布号
TWI436033
申请公布日期
2014.05.01
申请号
TW099141328
申请日期
2010.11.30
申请人
财团法人金属工业研究发展中心 高雄市楠梓区高楠公路1001号
发明人
卢宥任
分类号
G01B9/02;G01B11/24;G03B13/36
主分类号
G01B9/02
代理机构
代理人
蔡东贤 台北市松山区敦化北路201号7楼
主权项
地址
高雄市楠梓区高楠公路1001号
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