| 摘要 |
PROBLEM TO BE SOLVED: To provide a micro load cell which is more compact than ever and can handle micro loads.SOLUTION: A micro load cell comprises an integrally molded structural body 1 which includes a strain-inducing portion 2, and a strain gauge 3 which is attached on the strain-inducing portion 2 and has a Cr-N thin film as a detection material. The integrally molded structural body 1 includes a pair of fixing screw portions 4a and 4b which are positioned to face each other with the strain-inducing portion in between and has screw holes 5a and 5b aligned on an axis. The axis is an axis L along which force acts and on which the strain-inducing portion 2 lies. |
