发明名称 INSULATIVE CAP FOR BORDERLESS SELF-ALIGNING CONTACT IN SEMICONDUCTOR DEVICE
摘要 A method comprises: forming a semiconductor device on a base substrate, the semiconductor device having a core metal positioned proximate a source and a drain in the base substrate, a work function metal on a portion of the core metal, and a dielectric layer on a portion of the work function metal; forming a metal gate in electrical communication with one of the source and the drain; and implanting an insulator film on the core metal of the semiconductor device. The insulator film on the core metal forms an insulative barrier across the metal gate and between the core metal of the semiconductor device and the source or the drain.
申请公布号 US2014120709(A1) 申请公布日期 2014.05.01
申请号 US201213664955 申请日期 2012.10.31
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 CHENG KANGGUO;WANG JUNLI;WONG KEITH KWONG HON;YANG CHIH-CHAO
分类号 H01L21/28 主分类号 H01L21/28
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