发明名称 MICROWAVE HEATING APPARATUS AND PROCESSING METHOD
摘要 A microwave heating apparatus includes, a processing chamber, a microwave introducing unit, a support member and a heat assist member. The processing chamber is configured to accommodate an object to be processed, the processing chamber having a top wall, a bottom wall and a sidewall. The microwave introducing unit is configured to generate a microwave for heating the object and introduce the microwave into the processing chamber. The support member is configured to support the object by contact with the object in the processing chamber. The heating assist member is configured to generate heat by absorbing the microwave and assist heating of the object by radiant heat, the heating assist member disposed to be separated from the object by the support member.
申请公布号 US2014117009(A1) 申请公布日期 2014.05.01
申请号 US201314043779 申请日期 2013.10.01
申请人 TOKYO ELECTRON LIMITED 发明人 YAMAMOTO NOBUHIKO
分类号 H05B6/64 主分类号 H05B6/64
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