SUBSTRATE PROCESSING APPARATUS

摘要

In this substrate processing apparatus, a substrate tray is provided with a tray main body, and a substrate supporting board which includes a substrate supporting section that supports a substrate. The tray main body includes: a substrate holding section that holds a circumferential end portion of the substrate such that a substrate portion to be processed is exposed; and a magnet that is disposed outside of the substrate holding section such that the tray main body holds the substrate supporting board by means of a magnetic force. The substrate tray is held by means of a tray holder with a sealing member therebetween.