发明名称 HOUSING CASSETTE
摘要 PROBLEM TO BE SOLVED: To facilitate handling even in a case where a plurality of tabular objects are housed in a housing cassette, in which the tabular objects are housed, and the casette becomes heavy.SOLUTION: A housing cassette 1 for housing a plurality of tabular objects includes: facing side plates 10; a ceiling plate 11 and a base plate 12 which couple the side plates 10; a plurality of storage racks 100 which are formed on the side plates and store a tabular object; and an opening 14 becoming a carry-in/out opening when the tabular object is put int/out. Wheels 15 are arranged at lower parts of the side plates 10 or outside the base plate 12, and the housing cassette 1 can move with rotation of the wheels 15. Since self-traveling is possible in the housing cassette 1 by arranging the wheels at the lower parts of the side plates 10 or outside the base plate 12, movement of the housing cassette 1 becomes smooth between a carrier and a processing device and handling becomes easy even if a workpiece is stored and weight becomes heavy.
申请公布号 JP2014078656(A) 申请公布日期 2014.05.01
申请号 JP20120226796 申请日期 2012.10.12
申请人 DISCO ABRASIVE SYST LTD 发明人 SATO ATSUSHI
分类号 H01L21/673;B65D85/86;B65G49/07 主分类号 H01L21/673
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