发明名称 |
TEMPERATURE COMPENSATED RESONATOR DEVICE HAVING LOW TRIM SENSITIVY AND METHOD OF FABRICATING THE SAME |
摘要 |
A temperature compensated bulk acoustic wave (BAW) resonator device has low trim sensitivity for providing an accurate resonant frequency. The BAW resonator device includes a first electrode deposited on a substrate, a piezoelectric layer deposited on the first electrode, a second electrode deposited on the piezoelectric layer, and a mirror pair deposited on the second electrode. At least one of the first electrode and the second electrode includes an electrode layer, and a temperature compensating layer configured to compensate for a temperature coefficient of at least the piezoelectric layer. |
申请公布号 |
US2014117815(A1) |
申请公布日期 |
2014.05.01 |
申请号 |
US201213661669 |
申请日期 |
2012.10.26 |
申请人 |
AVAGO TECHNOLOGIES GENERAL IP (SINGAPORE) PTE.;AVAGO TECHNOLOGIES GENERAL IP (SINGAPORE) PTE. LTD |
发明人 |
BI ZHIQIANG;RUBY RICHARD C. |
分类号 |
H03H9/17;H01L41/22;H03H9/205 |
主分类号 |
H03H9/17 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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