| 摘要 |
PROBLEM TO BE SOLVED: To provide a coating unit capable of dealing with narrow pitches, a coating device and a transfer coating method.SOLUTION: The coating unit comprises a transfer head 3 for coating, with a flux, a plurality of points on a coating surface of a substrate 4. The transfer head 3 includes: a planar head body 6 including a plurality of first holes 7 corresponding to the plurality of points, respectively; first base parts 8 provided within the first holes 7; a transfer needle 9 protruding from the first base part 8 closer to the substrate 4; and first elastic support parts 12 which position the first base parts 8 at the same level in surface inside and outside directions of the head body 6 and connect edges of the first holes 7 and the first base parts 8. |
