| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a specimen imaging objective system that has a usable spectral bandwidth broadened, and to provide a method for imaging a specimen.SOLUTION: The present objective system comprises: a lens group that includes at least one focusing lens configured to receive a light energy and form an intermediate image; at least one field lens that is oriented so as to receive the intermediate image and emit an intermediate light energy; and a Mangin mirror arrangement that is positioned so as to receive the intermediate light energy and apply the light energy to the specimen. The present objective system can provide a usable spectral bandwidth capable of being expanded, for example, from 193 up to approximately 266nm at the maximum, and provide a numerical aperture in excess of 0.9. Since each element is less than 100 mm in a diameter, the objective system may be mounted to typical microscopes. The field lens may comprise one or more than one lens, and may be formed of, for example, a material different from at least one other lens of lenses in the present objective system.</p> |
