发明名称 |
AUTOMATIC WAFER DATA SAMPLE PLANNING AND REVIEW |
摘要 |
A method of constructing a mask for use in semiconductor device manufacturing is disclosed. A first shape that is related to mask construction is selected from a set of shapes. A second shape related to the mask construction is selected from the set of shapes. The first shape and the second shape are represented using a first shape vector and a second shape vector, respectively. A cluster is formed that includes the first shape and the second shape when the first shape vector and the second shape vector are within a selected criterion. |
申请公布号 |
US2014123083(A1) |
申请公布日期 |
2014.05.01 |
申请号 |
US201213663816 |
申请日期 |
2012.10.30 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
CASATI NATHALIE;DEMARIS DAVID;GABRANI MARIA;LUIJTEN RONALD P. |
分类号 |
G06F17/50 |
主分类号 |
G06F17/50 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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