ZINC OXIDE PRECURSOR AND METHOD OF DEPOSITING ZINC OXIDE-BASED THIN FILM USING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a zinc oxide precursor and a method of depositing a zinc oxide-based thin film using the same, with which a high-quality and high-purity zinc oxide-based thin film can be deposited.SOLUTION: A zinc oxide precursor includes a mixture solvent containing at least two organic solvents, and zinc oxide precursor source materials diluted in the mixture solvent. There is also provided a method of depositing a zinc oxide-based thin film using the same.