| 摘要 |
PROBLEM TO BE SOLVED: To solve such a problem that in regeneration of a resist stripping solution in the prior arts, a water content is separated from a used resist stripping solution and a solvent component is separated and extracted, however, the water content actually separated by vaporization cannot be regarded to be completely safe to the nature.SOLUTION: A regeneration apparatus for a resist stripping solution includes: a low boiling point separator for extracting a part of water as a waste solution (A) from a used resist stripping solution containing at least a solvent, water and a resist component by vaporization separation; a high boiling point separator for subjecting the separated residual solution from the low boiling point separator to vaporization separation to extract a separated resist residual solution containing the resist component and an additive, as well as to extract the solvent and residual water as a separated solution; a purifier for vaporizing and separating the residual water as a waste solution (B) from the separated solution from the high boiling point separator, and extracting the separated residual solution as a regenerated resist stripping solution; and a concentrator for further concentrating the waste solution (A) and the waste solution (B) to separate into water and a residual solution. |
