发明名称 STRIPPING AND CLEANING COMPOSITIONS FOR REMOVAL OF THICK FILM RESIST
摘要 <p>PROBLEM TO BE SOLVED: To provide stripping and cleaning compositions suitable for removal of a film resist.SOLUTION: Stripping and cleaning compositions suitable for removal of film resists include about 2-55 wt.% of at least one alkanolamine or at least one morpholine or mixtures thereof, about 20-94 wt.% of at least one organic solvent, and about 0.5-60 wt.% of water, based on the total weight of the composition.</p>
申请公布号 JP2014078009(A) 申请公布日期 2014.05.01
申请号 JP20130211097 申请日期 2013.10.08
申请人 AIR PRODUCTS AND CHEMICALS INC 发明人 EGBE MATTHEW I;WU AIPING;RAO MADHUKAR BHASKARA
分类号 G03F7/42;B29B17/02;H01L21/027 主分类号 G03F7/42
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