发明名称 |
STRIPPING AND CLEANING COMPOSITIONS FOR REMOVAL OF THICK FILM RESIST |
摘要 |
<p>PROBLEM TO BE SOLVED: To provide stripping and cleaning compositions suitable for removal of a film resist.SOLUTION: Stripping and cleaning compositions suitable for removal of film resists include about 2-55 wt.% of at least one alkanolamine or at least one morpholine or mixtures thereof, about 20-94 wt.% of at least one organic solvent, and about 0.5-60 wt.% of water, based on the total weight of the composition.</p> |
申请公布号 |
JP2014078009(A) |
申请公布日期 |
2014.05.01 |
申请号 |
JP20130211097 |
申请日期 |
2013.10.08 |
申请人 |
AIR PRODUCTS AND CHEMICALS INC |
发明人 |
EGBE MATTHEW I;WU AIPING;RAO MADHUKAR BHASKARA |
分类号 |
G03F7/42;B29B17/02;H01L21/027 |
主分类号 |
G03F7/42 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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