METHOD FOR MANUFACTURING OF THIN-FILM SOLAR BATTERY LIGHT ABSORPTION LAYER

摘要

PROBLEM TO BE SOLVED: To provide a method for manufacturing a thin-film solar battery light absorption layer.SOLUTION: A method for manufacturing a thin-film solar battery light absorption layer comprises: first, producing vapor of different organic metal sources in containers 2 having the different organic metal sources therein respectively; then, mixing the vapor of the organic metal sources with carrier gas; introducing another reactive gas into a reaction chamber 3 through a pipe line; and subsequently, depositing metals and compounds thereof on a substrate in the reaction chamber 3. In the method, the flow rates of the vapor of the different organic metal sources flowing into the reaction chamber 3 are controlled by respective flow-rate controllers 41.