| 摘要 |
PROBLEM TO BE SOLVED: To provide an amorphous carbon film coated member capable of obtaining high wear resistance, preventing an amorphous carbon film from being peeled and sufficiently suppressing release of contaminants from an anodized layer.SOLUTION: An amorphous carbon film coated member 1 has an amorphous carbon film 4 formed through an anodized layer 3 on a base material 2. Residual stress and Vickers hardness are controlled to a predetermined level to suppress a film defect by controlling a tensile residual stress of the anodized layer 3 to 40 MPa or less to suppress occurence of cracks, forming the amorphous carbon film 4 by a plasma CVD method, using hydrogen and carbon as a main component and controlling a hydrogen content to 15-31 at.%. |
