发明名称 APPARATUS FOR IMAGING UNIFORMLY IRRADIATED ARTICLE
摘要 <p>PROBLEM TO BE SOLVED: To provide an apparatus, including a reflective surface configured to reflect photons onto a surface of an article, a stage configured to support the article, and an assembly.SOLUTION: In some embodiments, the assembly is configured to radiate photons through the article to the reflective surface. The assembly is further configured to image the article with irradiance of the photons.</p>
申请公布号 JP2014077794(A) 申请公布日期 2014.05.01
申请号 JP20130213243 申请日期 2013.10.10
申请人 SEAGATE TECHNOLOGY LLC 发明人 JOACHIM WALTER AHNER ; DAVID M TUNG ; SAMUEL KAH HEAN WONG ; HENRY LUIS LOTT ; STEPHEN KEITH MCLAURIN ; MAISARAH NASHIRO ; FLORIN ZAVALICHE
分类号 G01N21/95 主分类号 G01N21/95
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