| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a technology for reducing a processing liquid to be consumed for removing air bubbles from a filter part when a novel filter part is mounted in a processing liquid supply path, and shortening a startup time.SOLUTION: A processing liquid supply method includes the steps of: filling the inside of a novel filter part with a processing liquid; then making the inside of the filter part into a first pressure atmosphere which is a negative pressure atmosphere, in order to remove air bubbles from the filter part; then boosting the inside of the filter part; conducting the processing liquid from a primary side of the filter part to the filter part thereafter while making a secondary side of the filter part into a second pressure atmosphere higher than the first pressure atmosphere; and performing liquid processing by supplying the processing liquid which has been conducted through the filter part, through a nozzle to an object to be processed. Thus, air bubbles can be speedily removed.</p> |
