发明名称 DIFFERING BOOST VOLTAGES APPLIED TO TWO OR MORE ANODELESS ELECTRODES FOR PLASMA PROCESSING
摘要 This disclosure describes a non-dissipative snubber circuit configured to boost a voltage applied to a load after the load's impedance rises rapidly. The voltage boost can thereby cause more rapid current ramping after a decrease in power delivery to the load which results from the load impedance rise. In particular, the snubber can comprise a combination of a unidirectional switch, a voltage multiplier, and a current limiter. In some cases, these components can be a diode, voltage doubler, and an inductor, respectively.
申请公布号 US2014117861(A1) 申请公布日期 2014.05.01
申请号 US201313867907 申请日期 2013.04.22
申请人 FINLEY KENNETH W.;CHRISTIE DAVID;ADVANCED ENERGY INDUSTRIES, INC. 发明人 FINLEY KENNETH W.;CHRISTIE DAVID
分类号 H05H1/48 主分类号 H05H1/48
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