METHOD AND DEVICE FOR SUPPLYING HYDROGEN-SELENIDE MIXED GAS

摘要

A calibration gas is caused to flow, at the same flow rate, through a flow control means that has been disposed in a feed gas supply channel and that controls the flow rate of hydrogen selenide gas which is a feed gas and through a flow rate measuring means for calibration. The set value of the flow rate of the hydrogen selenide gas which is caused to flow by the flow control means is corrected in accordance with the difference between the calibration-gas flow rate amounts measured respectively by the flow control means and the flow rate measuring means.