| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for producing an alkoxytrihalosilane, which provide a high yield by a simple method and high product selectivity.SOLUTION: Provided is a method for producing an alkoxytrihalosilane by reacting a tetrahalosilane A1 and an alcohol B1 in a gas phase. Also provided are a recovery system D1 for a product and detoxification systems D2 and D3 for an exhaust gas. |
