发明名称 ETCHING TREATMENT APPARATUS
摘要 Disclosed is an etching treatment apparatus. The etching treatment apparatus includes a crucible to receive a wafer, a wafer jig part having a groove into which the wafer is seated, and a size adjusting part inserted into the groove while making contact with the edge of the wafer.
申请公布号 US2014116623(A1) 申请公布日期 2014.05.01
申请号 US201214123376 申请日期 2012.05.30
申请人 LG INNOTEK CO., LTD. 发明人 KIM JI HYE
分类号 H01L21/683 主分类号 H01L21/683
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