| 摘要 |
PROBLEM TO BE SOLVED: To provide an acceleration sensor capable of increasing the detection sensitivity of acceleration in three directions perpendicular to each other.SOLUTION: The acceleration sensor includes; an X-detection section 10 that detects an acceleration in an X-direction by oscillating a first movable electrode 11 using a pair of beam sections 12a and 12b as axes; a Y-detection section 20 that detects an acceleration in a Y-direction by oscillating a second movable electrode 21 using a pair of beam sections 22a and 22b as axes; and a Z-detection section 30 that detects an acceleration in a Z-direction by allowing a third movable electrode 31, which is held by two pairs of beam sections 32a and 32b, 32c and 32d, to make a parallel movement in a vertical direction, which are disposed in one chip. |
