发明名称 INTEGRATING TRANSISTORS WITH DIFFERENT POLY-SILICON HEIGHTS ON THE SAME DIE
摘要 A method of fabricating an integrated circuit including a first region and a second region each having different poly-silicon gate structures is provided. The method includes depositing a first poly-silicon layer over the first and the second region and depositing, within the second region, an oxide layer over the first poly-silicon layer. A second poly-silicon layer is deposited over the first poly-silicon layer and the oxide region. A portion of the second poly-silicon layer that lies over the oxide region is then stripped away.
申请公布号 US2014117435(A1) 申请公布日期 2014.05.01
申请号 US201414149521 申请日期 2014.01.07
申请人 SPANSION LLC 发明人 LIN CHUAN;SHIRAIWA HIDEHIKO;DAVIS BRADLEY MARC;XUE LEI;CHAN SIMON S.;OHTSUKA KENICHI;HUI ANGELA T.;BELL SCOTT ALLAN
分类号 H01L29/49;H01L29/78 主分类号 H01L29/49
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