| 摘要 |
<p>The purpose of the present invention is to provide an anti-adhesive plate for a vacuum film deposition apparatus, which is highly effective in preventing delamination of deposition film material, and a method of manufacturing the same, as well as a vacuum film deposition apparatus and a vacuum film deposition method in which the anti-adhesive plate is employed. This anti-adhesive plate for vacuum film deposition apparatus is an anti-adhesive plate for vacuum film deposition apparatus for preventing adhesion of deposition film materials at unwanted locations in a vacuum film deposition apparatus. The anti-adhesive plate for vacuum film deposition apparatus is made of aluminum having a surface on which is formed an asperity structure including recessions of an average opening diameter of 0.01 to 9μm, inclusive, and on the surface of which are arrayed a plurality of protruding portions averaging in height from 30 to 1,000μm, inclusive, the average density of the protruding portions being 10 per 10 square mm or greater, and the percentage of surface area at the bottom parts of the protruding portions constituting from 10 to 90%, inclusive, within a 10 square mm area.</p> |
