基板台之遮盖、微影装置之基板台、微影装置及元件制造方法,申请号TW100108807-传众专利搜索

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发明名称	基板台之遮盖、微影装置之基板台、微影装置及元件制造方法
摘要
申请公布号	TWI436171	申请公布日期	2014.05.01
申请号	TW100108807	申请日期	2011.03.15
申请人	ＡＳＭＬ荷兰公司荷兰	发明人	拉法瑞　雷孟德　威黑墨斯　路易斯;罗赛特　耐可　贾可伯斯　乔汉;兹德拉夫科夫　亚历山得　尼可拉夫;史都丹　真　威廉;比杰　伯那都斯　兰伯杜斯　乔纳斯
分类号	G03F7/20;H01L21/027	主分类号	G03F7/20
代理机构		代理人	林嘉兴台北市松山区敦化北路201号7楼
主权项
地址	荷兰

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